Fabrication of Microchannel with Thin Cover Layer for an Optical Waveguide MEMS Switch Based on Microfluidics
نویسندگان
چکیده
منابع مشابه
Fabrication of Microchannel with Thin Cover Layer for an Optical Waveguide MEMS Switch Based on Microfluidics
We propose and demonstrate a new fabrication process of a microchannel using the Damascene process. This process aims to integrate photonic circuits with microchannels fabricated in a glass film. The microchannel is fabricated by the removal of the sacrificial layer after a sacrificial layer is formed by the Damascene process and the cover is formed by sputter deposition. A thin cover layer can...
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ژورنال
عنوان ژورنال: IEICE Transactions on Electronics
سال: 2007
ISSN: 0916-8524,1745-1353
DOI: 10.1093/ietele/e90-c.1.78